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圖書(shū)導(dǎo)航
多層膜集成結(jié)構(gòu)體聲波諧振器（英文版）
作者:張亞非 陳達(dá)
字?jǐn)?shù):214
頁(yè)數(shù):214
版次:
定價(jià):68
ISBN:978-7-313-08736-2
出版日期:2013/02
圖書(shū)簡(jiǎn)介
本書(shū)系統(tǒng)地闡述了薄膜體聲波諧振器的基本原理、設(shè)計(jì)方法、關(guān)鍵技術(shù)及其材料體系的要求，并對(duì)薄膜體聲波諧振器的重要應(yīng)用技術(shù)進(jìn)行了總結(jié)概括與深入分析。圖書(shū)目錄
Chapter 1 Introduction
Chapter 2 Propagation of Acoustic Wave in Crystals
Chapter 3 The Theory of FBAR
Chapter 4 The Deposition and Etching of AIN Film
Chapter 5 The FBAR with Membrane Structure
Chapter 6 Solidly Mounted Acoustic Resonator
Chapter 7 The Applications of FBAR in RF Filters
Chapter 8 The FBAR Excited by Lateral Filed
Chapter 9 High Sensitive Sensors Based on FBAR
Index
Chapter 2 Propagation of Acoustic Wave in Crystals
Chapter 3 The Theory of FBAR
Chapter 4 The Deposition and Etching of AIN Film
Chapter 5 The FBAR with Membrane Structure
Chapter 6 Solidly Mounted Acoustic Resonator
Chapter 7 The Applications of FBAR in RF Filters
Chapter 8 The FBAR Excited by Lateral Filed
Chapter 9 High Sensitive Sensors Based on FBAR
Index
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